Electron optics of microlenses with inclined beams
نویسندگان
چکیده
منابع مشابه
Electron optics of microlenses with inclined beams
For multielectron beam systems with a single electron source, the outside beams need to be collimated before entering the individual microcolumns. As an alternative of the traditional multibeam source design where the broad beam from the source is collimated by a single lens, the broad beam can be first split in subbeams that are focused by a microlens array and subsequently collimated by a def...
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ژورنال
عنوان ژورنال: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
سال: 2008
ISSN: 1071-1023
DOI: 10.1116/1.2897321